AOT-VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.

AOT-TB-616 high precision spin coater, 10000rpm stepless speed regulation, 4 - inch vacuum chuck for 150mm substrates, 10nm - level film thickness uniformity, quick delivery in 10 working days, coating solutions for labs and industry.