AOT-TB-616 high precision spin coater, 10000rpm stepless speed regulation, 4 - inch vacuum chuck for 150mm substrates, 10nm - level film thickness uniformity, quick delivery in 10 working days, coating solutions for labs and industry.
AOT-TB-616 high precision spin coater is designed for coating processes on wafer, glass, and ceramic substrates. It features a 0-10000rpm stepless speed regulation system, a standard 4-inch vacuum chuck (compatible with 10-150mm substrates), and time control precise to ±1 second (1-9999s adju
stable). Equipped with a 120W brushless motor and 0.01μm - level dynamic balancing technology, it ensures 10nm - level film uniformity. The all - metal body (7.5kg) includes a smart anti - splashing module and supports optional 85L/min oil - free vacuum pump. Suitable for photoresist, sol - gel, etc. Certified with CE/ROHS/CCC, offering 1-year warranty and delivery within 10 working days, meeting the needs of microelectronics labs, photovoltaic R&D, and university teaching.
Product Name
AOT-TB-616 High Precision Spin Coater
Condition
New
Place of Origin
China
Brand Name
AOT
Model Number
AOT-TB-616
Main Power Supply
Single-phase AC: 220 V/110 V, 50 Hz
Motor Power
120 W
Weight
7.5 KG
Dimensions (L × W × H)
30 CM × 40 CM × 30 CM
Certification
CE/ROSH/CCC
Warranty
1 year
Model Type
High precision spin coater
Speed
300 - 10000 rpm / min
Rotary Vacuum Suction Cup Diameter
4 inches (102 mm, standard configuration)
Optional Configuration
Orders for substrates with diameters of 10 - 150 mm are accepted
Time Setting
1 - 9999 seconds
Standard Packaging Dimensions
260 mm (width) × 350 mm (depth) × 260 mm (height)
Packaging Details
Export wooden packing
Delivery Detail
10 working days
Optional spares:
1. 85L / min with no-oil pump
2. Special vacuum suction (6 inch, 3 inch, 2 inch, 1 inch and smaller)
Product display
AOT-TB-616 High Precision Spin Coater
AOT-TB-616 high precision spin coater, 10000rpm stepless speed regulation, 4 - inch vacuum chuck for 150mm substrates, 10nm - level film thickness uniformity, CE/ROHS/CCC certified, quick delivery in 10 working days, coating solutions for labs and industry.
Exhibition
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Certificate
Cooperative partners
FAQ
Q1: Does the spin coater support coating of 6-inch wafers? A: Standard configuration includes a 4-inch chuck. A specialized 6-inch chuck is optional (must be specified when ordering), with maximum support for stable adsorption of 150mm substrates.
Q2: What is the accuracy error for the 300-10,000 rpm speed range? A: Utilizing closed-loop servo control, the full-scale speed deviation is <0.5%. Programmable acceleration curves enable compatibility with stepwise coating processes.
Q3: Does the warranty cover the vacuum pump? A: The main unit includes a 1-year warranty. The optional oil-free vacuum pump has a separate 6-month warranty, excluding consumable parts.
Q4: What advantages does the oil-free vacuum pump offer over conventional pumps? A: The 85L/min oil-free pump eliminates oil mist contamination in cleanroom environments, reduces noise to 52dB, and extends maintenance intervals to 2,000 hours.
Q5: Is the 10-business-day delivery period applicable to custom configurations? A: Standard configurations are guaranteed for 10-day delivery. Orders with specialized chucks or vacuum pumps will have delivery extended by 3-5 business days.
