Automatic Digital Spin Coater and Vacuum Spin Coater for Laboratory Spin Coating
AOT
Xiamen, China
10-25 working days
50 Sets/Month
AOT-VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.
AOT-VTC-100A Automatic Digital Spin Coater and Vacuum Spin Coater is designed for 4-inch wafers and irregular substrates. The automatic digital spin coater and vacuum spin coater adopts corrosion-resistant polypropylene liquid tray and three-stage vacuum suction cups, and supports two-stage programmable rotational speed control from 500 to 8,000 rpm, with an accuracy of ±1%. The automatic digital spin coater and vacuum spin coater integrates oil-free vacuum pump interface and adjustable syringe holder, suitable for viscosity 0.5 to 5000cPs sol material, single coating time 1 to 60 seconds adjustable. Standard with adhesive tape and micro suction cup options, compatible with 5 × 5mm to 10 × 10mm irregular substrate, film thickness uniformity ± 2%. Machine weight 15kg, size 330 x 254 x 216mm, plug and play, to meet the semiconductor, MEMS and optical thin film labs for efficient coating needs.
Parameter
Product Model
AOT-VTC-100A
Structure
An aluminum casting case to keep spinning stably
The liquid disk is made of Polypropylene (PP) to resist most of the corrosive solutions
The drainage outlet and vacuum pump connector are on the back panel
One filter is included in the standard package. It is used to connect the coater to prevent wastewater from flowing into the pump
One oil-less vacuum pump is included in the standard package, Please click here for specification details.
Chamber & Vacuum Chuck
Chamber Diameter: 145 mm
3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'', and 4'')
1 piece of adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
Mini suction cups are available for the small wafer with less than 1" Dia. or substrate with regular ( 5x5, or 10x10mm) or irregular shapes. Please click here to order. at extra cost. ( see picture below right )
Vacuum Pump (Not included)
From 09/07/2022, 120L/min Oilless Vacuum Pump is not included.
Vacuum grade rubber pipe is included for immediate use.
Spin Speed & Time
Digital control panel with TWO programmable segments for different spin times and speeds
Spinning speed: 500 - 8000 RPM
Spinning Time: 1 - 60s
Liquid Injecting
20mL syringe is used to contain the coating material
The syringe holder height can be adjusted and rotated freely along the support rod
Input Voltage
Spin Coater: 24 VDC with 100 - 240 VAC power adapter, 150W
Vacuum Pump: 110VAC or 220VAC please select the voltage in the options bar (10A fuse)
Motor Power
24V DC motor with 150W Max.
Product Dimension
330.2mm(L) x 254mm(W) x 215.9mm(H)
Weight
15 kg
Product display
Automatic Digital Spin Coater and Vacuum Spin Coater for Laboratory Spin Coating
AOT-VTC-100A automatic digital spin coater and vacuum spin coater, 4-inch wafer dedicated, 500-8000rpm two-stage programming, corrosion-resistant PP vacuum suction cups, compatible with irregular substrate sol-gel coating, laboratory-grade high-precision film thickness control, plug-and-play compact design.
Exhibition
AOT Lithium Battery Equipment exhibition provides exhibitors and visitors with a comprehensive platform for display, exchange, cooperation and trade. By participating in the exhibition, enterprises can understand the industry dynamics, expand market channels, enhance brand image and promote technological innovation and industrial upgrading.
Certificate
Cooperative partners
FAQ
Q1: How do I fit a 3" or non-standard size substrate?
A: Use the standard adhesive tape to attach the substrate to a 4-inch suction cup or optional customized miniature suction cups (5x5mm to 10x10mm) to ensure coating stability through vacuum attachment.
Q2: How does the oil-free vacuum pump work if the compact spin coater is not included?
A: A compatible vacuum pump (recommended flow rate ≥ 120L/min) should be purchased additionally and connected through the interface on the back of the unit to ensure that the vacuum level is > -80kPa to ensure stable adsorption of the substrate.
Q3: Is the compact spin coater suitable for high viscosity sol (>5000cPs)?
A: The compact spin coater is recommended to reduce the rotational speed to 500-2000rpm and extend the coating time to more than 30 seconds, and if necessary, preheat the sol to 25-30℃ to improve the fluidity.
Q4: How to clean the PP tray to avoid cross contamination?
A: Immediately after coating, rinse with deionized water. For organic solvent system, use ethanol to ultrasonically clean for 5 minutes, and strictly prohibit the use of strong acid and alkali to wipe.
Q5: Can the syringe holder be adapted to 50mL size?
A: The standard holder supports 20mL syringes. For larger volumes, the height of the holder can be adjusted and fixed manually, and it is recommended to inject the liquid in small portions to ensure uniformity of coating.
